• DocumentCode
    944282
  • Title

    Laser scanning of MOS IC´s reveals internal logic states nondestructively

  • Author

    Sawyer, David E. ; Berning, David W.

  • Author_Institution
    National Bureau of Standards, Washington, DC
  • Volume
    64
  • Issue
    3
  • fYear
    1976
  • fDate
    3/1/1976 12:00:00 AM
  • Firstpage
    393
  • Lastpage
    394
  • Abstract
    A laser scanning system has been used to observe the internal logic pattern in a MOS LSI device in a nondestructive manner. The laser scanner has also been used to selectively change logic states deep within the device. Pictures of the logic patterns revealed by the scanner are discussed.
  • Keywords
    Circuits; Discrete Fourier transforms; Equations; Fast Fourier transforms; Frequency; Hardware; Image storage; Logic devices; Shift registers; Sorting;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1976.10140
  • Filename
    1454409
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=944282