Title :
Laser scanning of MOS IC´s reveals internal logic states nondestructively
Author :
Sawyer, David E. ; Berning, David W.
Author_Institution :
National Bureau of Standards, Washington, DC
fDate :
3/1/1976 12:00:00 AM
Abstract :
A laser scanning system has been used to observe the internal logic pattern in a MOS LSI device in a nondestructive manner. The laser scanner has also been used to selectively change logic states deep within the device. Pictures of the logic patterns revealed by the scanner are discussed.
Keywords :
Circuits; Discrete Fourier transforms; Equations; Fast Fourier transforms; Frequency; Hardware; Image storage; Logic devices; Shift registers; Sorting;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1976.10140
