Polyimide-planarized vertical-cavity surface-emitting lasers with 17.0-GHz bandwidth

Author

Al-Omari, A.N. ; Lear, K.L.

Author_Institution

Electr. & Comput. Eng. Dept., Colorado State Univ., Fort Collins, CO, USA

Volume

16

Issue

4

fYear

2004

fDate

4/1/2004 12:00:00 AM

Firstpage

969

Lastpage

971

Abstract

High-speed oxide-confined polyimide-planarized 850-nm vertical-cavity surface-emitting lasers exhibit -3-dB modulation bandwidths up to 17.0 GHz. The devices are fabricated using a reproducible, simple process incorporating polyimide with good adhesion that does not require implantation or semiinsulating substrates to achieve low capacitance.

Keywords

adhesion; high-speed optical techniques; laser cavity resonators; optical fabrication; optical modulation; optical polymers; p-n heterojunctions; semiconductor device testing; semiconductor lasers; surface emitting lasers; 17.0 GHz; VCSEL; adhesion; device fabrication; high-speed vertical-cavity surface-emitting lasers; low capacitance; modulation bandwidth; oxide-confined vertical-cavity surface-emitting lasers; pad capacitance; polyimide-planarized vertical-cavity surface-emitting lasers; semiconductor lasers; Bandwidth; Circuits; Mirrors; Optical surface waves; Parasitic capacitance; Polyimides; Semiconductor lasers; Substrates; Surface emitting lasers; Vertical cavity surface emitting lasers;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2004.824622

Filename

1281840