Title :
Controlled superconducting transition of YBaCuO thin films prepared by plasma-enhanced MOCVD
Author :
Ebihara, K. ; Fujishima, T. ; Ikegami, T. ; Shiga, M. ; Harada, K.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Kumamoto Univ., Japan
fDate :
3/1/1993 12:00:00 AM
Abstract :
Several types of plasma-enhanced metalorganic chemical vapor deposition (MOCVD) systems are developed to prepare YBaCuO superconducting thin films. RF and microwave plasmas are used to enhance the decomposition of the source materials under moderated process conditions. Uniform YBaCuO films of large size were prepared with good reproducibility using a controlled material feeder.<>
Keywords :
barium compounds; high-temperature superconductors; plasma CVD; superconducting thin films; superconducting transition temperature; yttrium compounds; RF plasmas; YBa/sub 2/Cu/sub 3/O/sub 7- delta /; controlled material feeder; decomposition; high temperature superconductivity; microwave plasmas; plasma-enhanced metalorganic chemical vapor deposition; superconducting thin films; superconducting transition; Chemical vapor deposition; MOCVD; Plasma chemistry; Plasma materials processing; Plasma sources; Radio frequency; Superconducting materials; Superconducting microwave devices; Superconducting thin films; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
