Controlled superconducting transition of YBaCuO thin films prepared by plasma-enhanced MOCVD

Author

Ebihara, K. ; Fujishima, T. ; Ikegami, T. ; Shiga, M. ; Harada, K.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Kumamoto Univ., Japan

Volume

3

Issue

1

fYear

1993

fDate

3/1/1993 12:00:00 AM

Firstpage

976

Lastpage

978

Abstract

Several types of plasma-enhanced metalorganic chemical vapor deposition (MOCVD) systems are developed to prepare YBaCuO superconducting thin films. RF and microwave plasmas are used to enhance the decomposition of the source materials under moderated process conditions. Uniform YBaCuO films of large size were prepared with good reproducibility using a controlled material feeder.<>

Keywords

barium compounds; high-temperature superconductors; plasma CVD; superconducting thin films; superconducting transition temperature; yttrium compounds; RF plasmas; YBa/sub 2/Cu/sub 3/O/sub 7- delta /; controlled material feeder; decomposition; high temperature superconductivity; microwave plasmas; plasma-enhanced metalorganic chemical vapor deposition; superconducting thin films; superconducting transition; Chemical vapor deposition; MOCVD; Plasma chemistry; Plasma materials processing; Plasma sources; Radio frequency; Superconducting materials; Superconducting microwave devices; Superconducting thin films; Yttrium barium copper oxide;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.233860

Filename

233860