Title :
Some aspects of fabrication of YBCO thin films by inverted cylindrical magnetron sputtering in large area
Author :
Yuan, L. ; Huang, H.S. ; Wu, Z.Y. ; Liu, M.L. ; Jie, Q.M. ; Zhou, Z.B. ; Yang, Y.C. ; Cai, S.Z. ; Fang, J.G.
Author_Institution :
Dept. of Phys., Tsinghua Univ., Beijing, China
fDate :
3/1/1993 12:00:00 AM
Abstract :
The use of inverted cylindrical magnetron sputtering to produce high-quality superconducting thin films is investigated. The critical parameters in the sputtering process have been identified, and 10-mm*10-mm YBCO thin films with critical temperatures (T/sub c/´s) of 85-90 K and critical current densities (J/sub c/´s) of 1*10/sup 6/ A/cm/sup 2/ (77 K, 0 T) have been deposited reproducibly in optimal conditions. In order to extend the work to a large area, the sputtering gun and the heater have been redesigned. The film´s thickness and stoichiometric variation are less than +or-5% over a 50-mm*50-mm area. The uniformity of substrate temperature plays an important role in large-area in situ deposition of YBCO films. At optimum conditions, the variation of T/sub c/ is found to be less than +or-1 K.<>
Keywords :
barium compounds; critical current density (superconductivity); high-temperature superconductors; sputter deposition; stoichiometry; superconducting thin films; superconducting transition temperature; yttrium compounds; 10 mm; 50 mm; 77 to 90 K; YBa/sub 2/Cu/sub 3/O/sub 7- delta /; critical current densities; critical temperatures; film thickness; high temperature superconductivity; inverted cylindrical magnetron sputtering; stoichiometric variation; superconducting thin films; Fabrication; Plasma temperature; Pulsed laser deposition; Sputtering; Substrates; Superconducting epitaxial layers; Superconducting films; Superconducting magnets; Superconducting thin films; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
