Substrate temperature measurement for growth of large-area high-T/sub c/ superconducting films

Author

Choi, B.I. ; Flik, M.I. ; Anderson, A.C.

Author_Institution

Dept. of Mech. Eng., MIT, Cambridge, MA, USA

Volume

3

Issue

1

fYear

1993

fDate

3/1/1993 12:00:00 AM

Firstpage

1636

Lastpage

1639

Abstract

The substrate temperature has been measured and controlled by an adaptively calibrated pyrometer during the YBa/sub 2/Cu/sub 3/O/sub 7/ film deposition process. The experimental results show that a feedback control system based on this pyrometer can maintain the substrate temperature accurately at a set value. Thermal problems associated with the fabrication of multilayer structures are discussed. The study demonstrates accurate substrate temperature measurement and control for large-area film growth, facilitating the fabrication of high-quality superconducting electronic devices.<>

Keywords

barium compounds; high-temperature superconductors; pyrometers; sputter deposition; substrates; superconducting thin films; temperature control; temperature measurement; yttrium compounds; YBa/sub 2/Cu/sub 3/O/sub 7/; adaptively calibrated pyrometer; feedback control system; film deposition process; high temperature superconducting film; large-area film growth; magnetron sputter deposition; multilayer structures; substrate temperature; superconducting electronic devices; Control systems; Fabrication; Heating; Optical films; Silver; Substrates; Superconducting devices; Superconducting films; Temperature control; Temperature measurement;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.233908

Filename

233908