A Low-Loss Ku-Band Monolithic Analog Phase Shifter

A GaAs monolithic Ku-band analog phase shifter integrating 90° branch line coupler with planar varactor diodes has been fabricated for the first time. A phase shift of 109° +- 3° with an insertion loss of 1.8+-0.3 dB was measured from 16 to 18 GHz. A 360° phase shifter with 4.2+-0.9 dB insertion loss was realized in the same frequency range by connecting three phase-shifter chips in series. To our knowledge, this is the lowest insertion loss obtained by a 360° Ku-band phase shifter using monolithic circuits. In addition, hyperabrupt varactors using nonuniform doping profiles increased the phase shift by more than 30° and produced a more linear dependence of phase shift on control voltage.