Title :
Fabrication and measurement of submicron planar YBa/sub 2/Cu/sub 3/O/sub 7/ microbridge Josephson junctions
Author :
Bao, Z. ; Ji, L. ; Lin, K.Y. ; Bi, B. ; Han, S. ; Lukens, J.E.
Author_Institution :
Dept. of Phys., State Univ. of New York, Stony Brook, NY, USA
fDate :
3/1/1993 12:00:00 AM
Abstract :
Deep-submicron planar YBa/sub 2/Cu/sub 3/O/sub 7/ (YBCO) microbridge Josephson junctions (about 0.1- mu m to 0.5- mu m long and wide) were fabricated using two different approaches: (1) using electron beam lithography and argon-ion milling to make the designed bridge pattern; and (2) depositing YBCO on a substrate with a prepatterned MgO/sapphire bilayer structure. Both approaches have yielded microbridges showing constant voltage steps in the current-voltage characteristics under applied microwave fields. The step width is also found to show oscillatory microwave power dependence. The possible mechanism for the Josephson-like behavior observed and the physical significance of these deep submicron bridges are discussed. The observed phenomena might be explained by the vortex motion model.<>
Keywords :
Josephson effect; barium compounds; electron beam lithography; high-temperature superconductors; superconducting junction devices; yttrium compounds; Ar ion milling; MgO-Al/sub 2/O/sub 3/ substrate; YBa/sub 2/Cu/sub 3/O/sub 7/-MgO-Al/sub 2/O/sub 3/; applied microwave fields; constant voltage steps; current-voltage characteristics; deep submicron planar type; electron beam lithography; microbridge Josephson junctions; oscillatory microwave power dependence; prepatterned MgO/sapphire bilayer structure; vortex motion model; Bridge circuits; Electron beams; Fabrication; Josephson junctions; Lithography; Milling; Optical films; Substrates; Superconductivity; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
