Title :
SUSAN (Superconducting Systems Analysis) by Low Temperature Scanning Electron Microscopy (LTSEM)
Author :
Doderer, T. ; Hoffmann, D. ; Huebener, R.P. ; Kirchmann, N. ; Krulle, C.A. ; Lachenmann, S. ; Quenter, D. ; Schmidt, J. ; Stehle, S. ; Niemeyer, J. ; Popel, R. ; Benz, S.P. ; Booi, P.A.A.
Author_Institution :
Phys. Inst., Tubingen Univ., Germany
fDate :
3/1/1993 12:00:00 AM
Abstract :
Low-temperature scanning electron microscopy was used for spatially resolved investigations of both Josephson junctions and superconducting integrated circuits during their operation with a spatial resolution of about 1 mu m. Using single Josephson tunnel junctions of various geometries, the authors studied different dynamic states such as fluxon oscillations or unidirectional flux flow. With an integrated circuit consisting of a two-dimensional array of tunnel junctions and an RF detection circuit they investigated the RF properties of the coupling circuit and confirmed the existence of an impedance mismatch and a geometrical standing wave in the blocking capacitor. The studies of the dynamics of single Josephson tunnel junctions of various geometries showed a linear behavior (excitation of single cavity modes) if the boundary conditions dominate, and otherwise a nonlinear behavior (excitation of solutions).<>
Keywords :
Josephson effect; electron beam testing; inspection; integrated circuit testing; low-temperature techniques; scanning electron microscopy; superconducting integrated circuits; superconducting junction devices; 1 micron; Josephson junctions; LTSEM; Low Temperature Scanning Electron Microscopy; RF detection circuit; RF properties; SUSAN; Superconducting Systems Analysis; blocking capacitor; boundary conditions; coupling circuit; fluxon oscillations; geometrical standing wave; impedance mismatch; linear behavior; nonlinear behavior; single Josephson tunnel junctions; solitons excitation; superconducting integrated circuits; two-dimensional array; unidirectional flux flow; Coupling circuits; Geometry; Impedance; Josephson junctions; Radio frequency; Radiofrequency integrated circuits; Scanning electron microscopy; Spatial resolution; Superconducting integrated circuits; Temperature;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
