Title :
Etching and annealing of substrates for superconducting multilayers and devices
Author :
Berkowitz, S.J. ; De Obaldia, E. ; Galloway, M.L. ; Morales, G. ; Ludwig, K.F. ; Mankiewich, P.M. ; Skocpol, W.J. ; Ono, R.H. ; Beall, J.A. ; Vale, L.R. ; Rudman, D.A.
Author_Institution :
Boston Univ., MA, USA
fDate :
3/1/1993 12:00:00 AM
Abstract :
The structural and electrical quality of YBa/sub 2/Cu/sub 3/O/sub 7- delta / grown on ion-etched substrates by a variety of techniques was investigated. Co-evaporated YBa/sub 2/Cu/sub 3/O/sub 7- delta / films deposited and postannealed on etched LaAlO/sub 3/ substrates have substantially higher room-temperature resistivities and wider c-axis rocking curve widths than films on unetched substrates. Annealing of the etched substrate prior to evaporation narrows the c-axis rocking curve width and restores resistivity and critical current densities to values comparable to those of the unetched controls. Laser-ablated films on etched substrates show a smaller absolute magnitude of rocking curve broadening and no change in DC electrical properties. An increase of the inhomogeneous strain was also observed in coevaporated postannealed and laser-ablated films on etched substrates.<>
Keywords :
annealing; barium compounds; critical current density (superconductivity); high-temperature superconductors; lanthanum compounds; pulsed laser deposition; sputter etching; strontium compounds; substrates; superconducting junction devices; superconducting thin films; vapour deposited coatings; vapour deposition; yttrium compounds; HTSC; LaAlO/sub 3/ substrates; SrTiO/sub 3/ substrates; YBa/sub 2/Cu/sub 3/O/sub 7- delta / films; annealing; c-axis rocking curve widths; co-evaporated films; critical current densities; electrical quality; inhomogeneous strain; ion-etched substrates; laser ablated films; room-temperature resistivities; superconducting devices; superconducting multilayers; superconducting thin films; Annealing; Capacitive sensors; Conductivity; Critical current density; Etching; Josephson junctions; Nonhomogeneous media; Substrates; Superconducting devices; Superconducting films;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
