Patterning of thin-film high-T/sub c/ circuits by the laser-writing method

Author

Sobolewski, R. ; Xiong, W. ; Kula, W.

Author_Institution

Dept. of Electr. Eng., Rochester Univ., NY, USA

Volume

3

Issue

1

fYear

1993

fDate

3/1/1993 12:00:00 AM

Firstpage

2986

Lastpage

2989

Abstract

The authors report studies on a laser-based 2-D patterning technique that implements a focused beam from a continuous-wave (CW) Ar-ion laser to locally heat up an epitaxial Y-Ba-Cu-O film in a controlled (oxygen-rich or oxygen-poor) atmosphere. It is shown that the laser-writing method enables a reproducible fabrication in the same film of oxygen-depleted (semiconducting) regions next to enriched ones (superconducting), in a manner similar to n- and p-type diffusion regions in semiconductors. A number of test structures, laser-written in initially oxygen-rich or oxygen-poor films deposited on MgO, SrTiO/sub 3/, and LaAlO/sub 3/ single crystals, have been measured. The best, very homogeneous superconducting (oxygen-rich) circuits were patterned in oxygen-depleted YBCO deposited in the LaAlO/sub 3/ substrates. The structures exhibited a 0.5-K-wide superconducting transition, T/sub c0/=89.5 K, and J/sub c/ above 10/sup 5/ A/cm/sup 2/.<>

Keywords

barium compounds; critical current density (superconductivity); high-temperature superconductors; laser ablation; photolithography; superconducting epitaxial layers; superconducting integrated circuits; superconducting junction devices; yttrium compounds; LaAlO/sub 3/ substrates; MgO substrate; SiTiO/sub 3/ substrate; critical current density; epitaxial YBaCuO film; laser-based 2-D patterning; laser-writing method; reproducible fabrication; superconducting transition; thin-film high-T/sub c/ circuits; Laser beams; Molecular beam epitaxial growth; Optical control; Semiconductor films; Semiconductor lasers; Superconducting epitaxial layers; Superconducting films; Temperature control; Transistors; Yttrium barium copper oxide;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.234031

Filename

234031