DocumentCode
948372
Title
Miniature silicon resonant pressure sensor
Author
Greenwood, J.C. ; Satchell, D.W.
Author_Institution
STC Technology Ltd., Harlow, UK
Volume
135
Issue
5
fYear
1988
fDate
9/1/1988 12:00:00 AM
Firstpage
369
Lastpage
372
Abstract
An absolute barometric pressure sensor which has shown exceptional performance is described in the paper. It consists of a mechanical resonator whose resonant frequency is changed by strain induced by applied pressure. The active element is formed in one piece, from single-crystal silicon, by microengineering techniques. It has a range from vacuum to a pressure of over 1 bar (105 Pa) and can resolve less than 1 part in 105 of full scale.
Keywords
barometers; pressure control; pressure measurement; pressure transducers; 0 to 1 bar; Si resonant pressure sensor; barometric pressure sensor; mechanical resonator; microengineering techniques; pressure measurement; resonant frequency;
fLanguage
English
Journal_Title
Control Theory and Applications, IEE Proceedings D
Publisher
iet
ISSN
0143-7054
Type
jour
DOI
10.1049/ip-d.1988.0056
Filename
4648562
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