DocumentCode
948391
Title
Silicon flow sensors
Author
van Oudheusden, B.W.
Author_Institution
Delft University of Technology, Electronic Instrumentation Laboratory, Department of Electrical Engineering, Delft, Netherlands
Volume
135
Issue
5
fYear
1988
fDate
9/1/1988 12:00:00 AM
Firstpage
373
Lastpage
380
Abstract
A short review is given of the principles of thermal flow sensors in silicon. Sensor structures based on the thermal anemometer principle are discussed, as are the integrated flow sensors developed at Delft University of Technology which use the detection of an onchip temperature difference. Recent research on one-and two-dimensional sensors for the measurement of both flow magnitude and direction are presented, including experimental results.
Keywords
anemometry; electric sensing devices; flow measurement; monolithic integrated circuits; thermal variables measurement; Si flow sensors; flow magnitude; monolithic IC; onchip temperature difference detection; thermal anemometer; thermal flow sensors;
fLanguage
English
Journal_Title
Control Theory and Applications, IEE Proceedings D
Publisher
iet
ISSN
0143-7054
Type
jour
DOI
10.1049/ip-d.1988.0057
Filename
4648564
Link To Document