DocumentCode

948758

Title

2001 Best Paper Award

Author

Boning, Duane S.

Volume

15

Issue

4

fYear

2002

Firstpage

369

Lastpage

370

Keywords

Awards;

fLanguage

English

Journal_Title

Semiconductor Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/TSM.2002.804871

Filename

1134146