DocumentCode :
948758
Title :
2001 Best Paper Award
Author :
Boning, Duane S.
Volume :
15
Issue :
4
fYear :
2002
Firstpage :
369
Lastpage :
370
Keywords :
Awards;
fLanguage :
English
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.2002.804871
Filename :
1134146
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=948758
