DocumentCode

948765

Title

Changes in the Editorial Board

Author

Boning, Duane S.

Author_Institution

Massachusetts Institute of Technology

Volume

15

Issue

4

fYear

2002

Firstpage

371

Lastpage

371

fLanguage

English

Journal_Title

Semiconductor Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/TSM.2002.804868

Filename

1134147