Title :
Quantifying the value of ownership of yield analysis technologies
Author :
Weber, Charles ; Sankaran, Vijay ; Tobin, Kenneth W., Jr. ; Scher, Gary
Author_Institution :
Sloan Sch. of Manage., MIT, Cambridge, MA, USA
fDate :
11/1/2002 12:00:00 AM
Abstract :
A model based on information theory, which allows yield managers to determine an optimal portfolio of yield analysis technologies for both the R&D and volume production environments, is presented. The information extraction per experimentation cycle and information extraction per unit time serve as benchmarking metrics for yield learning. They enable yield managers to make objective comparisons of apparently unrelated technologies. Combinations of four yield analysis tools - electrical testing, automatic defect classification, spatial signature analysis and wafer position analysis - are examined in detail to determine the relative value of ownership of different yield analysis technologies.
Keywords :
information theory; inspection; integrated circuit modelling; integrated circuit testing; integrated circuit yield; production testing; R&D environments; automatic defect classification; benchmarking metrics; electrical testing; information extraction per experimentation cycle; information extraction per unit time; information theory based model; optimal portfolio; spatial signature analysis; value of ownership; volume production environments; wafer position analysis; yield analysis technologies; yield learning; yield managers; Benchmark testing; Data mining; Environmental management; Information analysis; Information theory; Portfolios; Production; Research and development; Research and development management; Technology management;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2002.804876
