DocumentCode
948855
Title
Guest editorial special section on the international symposium on semiconductor manufacturing
Author
Sohn, Bruce
Author_Institution
Intel Corporation
Volume
15
Issue
4
fYear
2002
Firstpage
427
Lastpage
428
Keywords
Companies; Integrated circuit technology; Manufacturing automation; Manufacturing processes; Optimized production technology; Product design; Pulp manufacturing; Semiconductor device manufacture; Silicon; Transistors;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2002.804870
Filename
1134155
Link To Document