A calibration and measurement method of a tri-six-port network analyzer suitable for on-wafer characterization of three-port devices

A calibration and measurement method using a wideband tri-six-port network and analyzer (TSPNA) is proposed. The scattering parameters of a three-port device under test are found to be the unknowns of a set of nine simultaneous complex linear equations. These equations are established via a group of three calibrated linearly independent excitations. No isolators are required for calibration and measurement procedures. Three unknown reciprocal two-port standards are needed for the calibration of the TSPNA. The proposed method is rigorous, explicit, and suitable for wideband on-wafer three-port device S-parameter measurements. It can easily be adapted for heterodyne automated network analyzers equipped with three reflection test-set units