DocumentCode
950750
Title
Resolution of spreading-resistance measurements on shallow layers
Author
Abbasi, Shuja A. ; Brunnschweiler, A.
Author_Institution
University of Southampton, Department of Electronics, Southampton, UK
Volume
15
Issue
10
fYear
1979
Firstpage
290
Lastpage
292
Abstract
The limited spatial resolution of spreading-resistance measurements made on shallow diffused layers is demonstrated both experimentally and theoretically. This effect seems to have been overlooked in the literature and may account for the discrepancies that are sometimes observed in profiles derived from spreading-resistance data obtained from bevelled surfaces.
Keywords
doping profiles; electric resistance measurement; materials testing; bevelled surfaces; doping profile measurement; edge effects; semiconductor material testing; shallow diffused layers; spatial resolution; spreading resistance measurements;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19790207
Filename
4243240
Link To Document