DocumentCode
951112
Title
Cross-coupling errors of micromachined gyroscopes
Author
Kanso, Eva ; Szeri, Andrew J. ; Pisano, Albert P.
Author_Institution
Dept. of Mech. Eng., Univ. of California, Berkeley, CA, USA
Volume
13
Issue
2
fYear
2004
fDate
4/1/2004 12:00:00 AM
Firstpage
323
Lastpage
331
Abstract
A model is developed for the response of a micromachined, rotary gyroscope subject to a general input motion. The governing equations are formulated for weakly nonlinear oscillations of the rotor, suspended above the moving substrate via elastic beams. The method of multiple scales is used to separate the slow and fast responses. This approach allows quick computation of the long-term behavior of the rotor without the need to integrate over fast oscillations. The power of the model to evince cross-coupling errors is demonstrated through examples.
Keywords
gyroscopes; micromachining; oscillations; rotors; cross-coupling errors; elastic beams; fast oscillations; general input motion; micromachined gyroscopes; moving substrate; multiple scales method; rotor long-term behavior; weakly nonlinear oscillations; Gyroscopes; Helium; Manufacturing; Mathematical model; Motion estimation; Motion measurement; Nonlinear equations; Optical coupling; Resonant frequency; Springs;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2004.825293
Filename
1284370
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