Title :
A Survey of Conducton Mechanisms in Very Thin Films
Author_Institution :
Univ. of Nebraska, Lincoln, NE
fDate :
3/1/1964 12:00:00 AM
Abstract :
This survey deals with conduction mechanisms in thin films, both metals and dielectrics, in the thickness range between 10-6and 10-5cm and generally under 2-3 x 10-6cm. Conduction in metals with an island structure is discussed in terms of a thermally-activated process based on a model suggested by Frenkel. The model makes it possible to interpret the behavior qualitatively. Dielectrics exhibit a tunneling-like behavior and/or a Schottky-like behavior depending on thickness and temperature. Anomolous effects such as the negative resistance sandwich structure and gap structures with low work functions are also discussed.
Keywords :
Conductive films; Current density; Dielectric constant; Dielectric thin films; Electrons; Kelvin; Sandwich structures; Temperature; Thin film devices; Transistors;
Journal_Title :
Component Parts, IEEE Transactions on
DOI :
10.1109/TCP.1964.1134966