DocumentCode
952702
Title
A Survey of Conducton Mechanisms in Very Thin Films
Author
Bashara, N.M.
Author_Institution
Univ. of Nebraska, Lincoln, NE
Volume
11
Issue
1
fYear
1964
fDate
3/1/1964 12:00:00 AM
Firstpage
4
Lastpage
9
Abstract
This survey deals with conduction mechanisms in thin films, both metals and dielectrics, in the thickness range between 10-6and 10-5cm and generally under 2-3 x 10-6cm. Conduction in metals with an island structure is discussed in terms of a thermally-activated process based on a model suggested by Frenkel. The model makes it possible to interpret the behavior qualitatively. Dielectrics exhibit a tunneling-like behavior and/or a Schottky-like behavior depending on thickness and temperature. Anomolous effects such as the negative resistance sandwich structure and gap structures with low work functions are also discussed.
Keywords
Conductive films; Current density; Dielectric constant; Dielectric thin films; Electrons; Kelvin; Sandwich structures; Temperature; Thin film devices; Transistors;
fLanguage
English
Journal_Title
Component Parts, IEEE Transactions on
Publisher
ieee
ISSN
0097-6601
Type
jour
DOI
10.1109/TCP.1964.1134966
Filename
1134966
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