• DocumentCode
    952702
  • Title

    A Survey of Conducton Mechanisms in Very Thin Films

  • Author

    Bashara, N.M.

  • Author_Institution
    Univ. of Nebraska, Lincoln, NE
  • Volume
    11
  • Issue
    1
  • fYear
    1964
  • fDate
    3/1/1964 12:00:00 AM
  • Firstpage
    4
  • Lastpage
    9
  • Abstract
    This survey deals with conduction mechanisms in thin films, both metals and dielectrics, in the thickness range between 10-6and 10-5cm and generally under 2-3 x 10-6cm. Conduction in metals with an island structure is discussed in terms of a thermally-activated process based on a model suggested by Frenkel. The model makes it possible to interpret the behavior qualitatively. Dielectrics exhibit a tunneling-like behavior and/or a Schottky-like behavior depending on thickness and temperature. Anomolous effects such as the negative resistance sandwich structure and gap structures with low work functions are also discussed.
  • Keywords
    Conductive films; Current density; Dielectric constant; Dielectric thin films; Electrons; Kelvin; Sandwich structures; Temperature; Thin film devices; Transistors;
  • fLanguage
    English
  • Journal_Title
    Component Parts, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0097-6601
  • Type

    jour

  • DOI
    10.1109/TCP.1964.1134966
  • Filename
    1134966