Title :
Substrates for Thin-Film Circuitry
Author :
MacAvoy, T. ; Halaby, S.
Author_Institution :
Corning Glass Works, Corning, NY
fDate :
3/1/1964 12:00:00 AM
Abstract :
The properties of available glass, ceramic and other substrate materials are reviewed in the light of requirements imposed by current practice in thin-film circuitry. Special substrate glasses and glazed high thermal conductivity ceramics appear to be best suited to the majority of applications. Techniques for evaluation of the smoothness of substrate surfaces are reviewed and procedures for cleaning glass and glaze surfaces are recommended.
Keywords :
Conducting materials; Conductive films; Dielectric materials; Glass; Magnetic films; Magnetic materials; Optical films; Substrates; Superconducting films; Thin film circuits;
Journal_Title :
Component Parts, IEEE Transactions on
DOI :
10.1109/TCP.1964.1134970
