• DocumentCode
    952746
  • Title

    Substrates for Thin-Film Circuitry

  • Author

    MacAvoy, T. ; Halaby, S.

  • Author_Institution
    Corning Glass Works, Corning, NY
  • Volume
    11
  • Issue
    1
  • fYear
    1964
  • fDate
    3/1/1964 12:00:00 AM
  • Firstpage
    15
  • Lastpage
    22
  • Abstract
    The properties of available glass, ceramic and other substrate materials are reviewed in the light of requirements imposed by current practice in thin-film circuitry. Special substrate glasses and glazed high thermal conductivity ceramics appear to be best suited to the majority of applications. Techniques for evaluation of the smoothness of substrate surfaces are reviewed and procedures for cleaning glass and glaze surfaces are recommended.
  • Keywords
    Conducting materials; Conductive films; Dielectric materials; Glass; Magnetic films; Magnetic materials; Optical films; Substrates; Superconducting films; Thin film circuits;
  • fLanguage
    English
  • Journal_Title
    Component Parts, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0097-6601
  • Type

    jour

  • DOI
    10.1109/TCP.1964.1134970
  • Filename
    1134970
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=952746