DocumentCode
952867
Title
Characteristics of epitaxial garnets grown by CVD using single metal alloy source
Author
Besser, P.J. ; Hamilton, T.N. ; Mee, J.E. ; Stermer, R.L. ; Mee, J. ; Stermer, R.
Author_Institution
Rockwell international corporation, Anaheim, CA
Volume
10
Issue
3
fYear
1974
fDate
9/1/1974 12:00:00 AM
Firstpage
492
Lastpage
495
Abstract
Single metal alloys have been explored as the cation source in the chemical vapor deposition (CVD) of iron garnets. Growth of good quality single crystal garnet films containing as many as five different cations has been achieved over a wide range of deposition conditions. The relationship of film composition to alloy compositions and deposition conditions has been determined for several materials. By proper choice of the alloy composition and the deposition conditions, uncrazed deposits were grown on
Keywords
Chemical vapor deposition; Gallium alloys; Garnet films; Inductors; Iron alloys; Magnetic films; Magnetic separation; Optical films; Reproducibility of results; Temperature sensors;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.1974.1058488
Filename
1058488
Link To Document