Title :
Design and performance evaluation of a microlinear switched-reluctance motor
Author :
Liu, Cheng-Tsung ; Chiang, Tsung-Shiun
Author_Institution :
Dept. of Electr. Eng., Nat. Sun Yat-sen Univ., Kaohsiung, Taiwan
fDate :
3/1/2004 12:00:00 AM
Abstract :
To achieve low-cost and high-precision operational requirements in microelectronics fabrication industry, a new microlinear switched-reluctance motor (μLSRM) design that being integrated with the microelectromechanical system (MEMS) processing scheme has been investigated. With the degraded property of magnetic material after electroplating process and the geometric constraints of MEMS fabricating technology all being taken into account, the motor generated propulsive/normal force ratios at various pole shapes and winding excitation levels have been analyzed by three-dimensional finite element analysis. Results showed that the design objectives could be successfully fulfilled by the proposed μLSRM structure.
Keywords :
finite element analysis; linear synchronous motors; machine theory; machine windings; micromechanical devices; micromotors; reluctance motors; winding (process); μLSRM design; MEMS processing scheme; electroplating process; fabricating technology; geometric constraints; high-precision operational requirements; low-cost operational requirements; magnetic material; microelectromechanical system; microelectronics fabrication industry; microlinear switched-reluctance motor; motor generated propulsive-normal force ratio; performance evaluation; pole shapes; saturation; three-dimensional finite element analysis; winding excitation levels; Degradation; Fabrication; Magnetic analysis; Magnetic materials; Magnetic properties; Microelectromechanical systems; Microelectronics; Micromechanical devices; Micromotors; Textile industry;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2004.824560
