Design and performance evaluation of a microlinear switched-reluctance motor

Author

Liu, Cheng-Tsung ; Chiang, Tsung-Shiun

Author_Institution

Dept. of Electr. Eng., Nat. Sun Yat-sen Univ., Kaohsiung, Taiwan

Volume

40

Issue

2

fYear

2004

fDate

3/1/2004 12:00:00 AM

Firstpage

806

Lastpage

809

Abstract

To achieve low-cost and high-precision operational requirements in microelectronics fabrication industry, a new microlinear switched-reluctance motor (μLSRM) design that being integrated with the microelectromechanical system (MEMS) processing scheme has been investigated. With the degraded property of magnetic material after electroplating process and the geometric constraints of MEMS fabricating technology all being taken into account, the motor generated propulsive/normal force ratios at various pole shapes and winding excitation levels have been analyzed by three-dimensional finite element analysis. Results showed that the design objectives could be successfully fulfilled by the proposed μLSRM structure.

Keywords

finite element analysis; linear synchronous motors; machine theory; machine windings; micromechanical devices; micromotors; reluctance motors; winding (process); μLSRM design; MEMS processing scheme; electroplating process; fabricating technology; geometric constraints; high-precision operational requirements; low-cost operational requirements; magnetic material; microelectromechanical system; microelectronics fabrication industry; microlinear switched-reluctance motor; motor generated propulsive-normal force ratio; performance evaluation; pole shapes; saturation; three-dimensional finite element analysis; winding excitation levels; Degradation; Fabrication; Magnetic analysis; Magnetic materials; Magnetic properties; Microelectromechanical systems; Microelectronics; Micromechanical devices; Micromotors; Textile industry;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2004.824560

Filename

1284537