DocumentCode
953014
Title
Thin Films of Titanium and Titanium Oxide for Microminiaturization
Author
Huber, Franz
Author_Institution
Republic Aviation Company
Volume
11
Issue
2
fYear
1964
fDate
6/1/1964 12:00:00 AM
Firstpage
38
Lastpage
47
Abstract
Experimental results on the electrical properties of thin-film resistors, thin-film capacitors and thin-film diodes made of titanium/ titanium oxide/metal layers are described. The conduction phenomena in the three-layer titanium/ titanium oxide/metal structure are explained on the basis of a p-n Junction and p-i-n junction within the anodically formed oxide films.
Keywords
Boats; Capacitors; P-i-n diodes; Resistors; Semiconductor diodes; Semiconductor thin films; Strips; Thin film circuits; Titanium; Transistors;
fLanguage
English
Journal_Title
Component Parts, IEEE Transactions on
Publisher
ieee
ISSN
0097-6601
Type
jour
DOI
10.1109/TCP.1964.1134997
Filename
1134997
Link To Document