Title :
Thin Films of Titanium and Titanium Oxide for Microminiaturization
Author_Institution :
Republic Aviation Company
fDate :
6/1/1964 12:00:00 AM
Abstract :
Experimental results on the electrical properties of thin-film resistors, thin-film capacitors and thin-film diodes made of titanium/ titanium oxide/metal layers are described. The conduction phenomena in the three-layer titanium/ titanium oxide/metal structure are explained on the basis of a p-n Junction and p-i-n junction within the anodically formed oxide films.
Keywords :
Boats; Capacitors; P-i-n diodes; Resistors; Semiconductor diodes; Semiconductor thin films; Strips; Thin film circuits; Titanium; Transistors;
Journal_Title :
Component Parts, IEEE Transactions on
DOI :
10.1109/TCP.1964.1134997
