Title :
The Application of a Flash Discharge Lamp to the Determination of Impurities in Thin Films
Author_Institution :
Bell Telephone Laboratories, Inc., Murray Hill, NJ
fDate :
6/1/1964 12:00:00 AM
Keywords :
Chemical analysis; Gases; Impurities; Lamps; Nitrogen; Plugs; Resistors; Substrates; Thin film circuits; Transistors;
Journal_Title :
Component Parts, IEEE Transactions on
DOI :
10.1109/TCP.1964.1135006
