Use of scanning electron microscope for multichannel sampling oscillography

A method for measuring two or more waveforms on different metal lines inside an integrated circuit and displaying the result as a stationary image on a CRT screen is described. The finely focused electron beam of a scanning electron microscope serves as a probe with a minimal current load on the sample. For example, two measured waveforms are displayed with a time resolution of 25 ns and a voltage resolution of 500 mV.