Title :
Single-crystal silicon-barrier Josephson junctions
Author :
Huang, C.L. ; Duzer, T.
Author_Institution :
IEEE TMAG
fDate :
3/1/1975 12:00:00 AM
Abstract :
We have made and tested 1250Å-thick silicon-barrier Josephson junctions. The junctions tested show supercurrent and have junction characteristics which may be useful for high-frequency applications. A detailed junction fabrication process and the effects of surface oxides on the junction characteristics are described.
Keywords :
Josephson devices; Boron; Fabrication; Impurities; Josephson junctions; Semiconductor films; Silicon; Sputter etching; Superconducting films; Superconductivity; Testing;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.1975.1058702
