DocumentCode :
955537
Title :
Acoustic microscopy—1979
Author :
Kessler, Lawrence W. ; Yuhas, Donald E.
Author_Institution :
Sonoscan, Inc., Bensenville, IL
Volume :
67
Issue :
4
fYear :
1979
fDate :
4/1/1979 12:00:00 AM
Firstpage :
526
Lastpage :
536
Abstract :
Acoustic microscopy is emerging as an important analytical technique serving the needs of both biomedical and materials technology. Based upon imaging of specimens with elastic waves at VHF and UHF frequencies, acoustic microscopes reveal structural-mechanical properties with high magnification. A review of the techniques and their applications are presented.
Keywords :
Acoustic devices; Acoustic waves; Biomedical acoustics; Electron microscopy; Frequency; Instruments; Materials science and technology; Quality control; Scanning electron microscopy; Ultrasonic imaging;
fLanguage :
English
Journal_Title :
Proceedings of the IEEE
Publisher :
ieee
ISSN :
0018-9219
Type :
jour
DOI :
10.1109/PROC.1979.11281
Filename :
1455550
Link To Document :
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