Title :
Characteristics of an Indium-Tin Oxide Transparent Conductor Deposited from Organometallic Compositions
Author :
Siuta, Vincent ; Stein, Sidney J.
Author_Institution :
Electro Science Labs.,Inc.,Pennsauken, NJ
fDate :
9/1/1978 12:00:00 AM
Abstract :
The characteristics of an organometallic formulation are described that may be suitable for forming the transparent electrodes of liquid crystal and other displays directly by screen printing. When printed on glass and fired at approximately 550°C, a thin film of In
2-xSn
xO
3-ysemiconducting oxide approximately 2500 Å thick is obtained. The sheet resistance of the In
2-xSn
xO
3-yfilm is about 1 k

/

, and its optical transmission in the visible range is greater than 95 percent.
Keywords :
Conducting films; Indium alloys/compounds, devices; Liquid crystal displays; Tin alloys/compounds, devices; Conductors; Electrodes; Glass; Liquid crystal displays; Optical films; Printing; Semiconductivity; Semiconductor films; Semiconductor thin films; Tin;
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
DOI :
10.1109/TCHMT.1978.1135280