• DocumentCode
    956254
  • Title

    Making LSI Circuits: A Comparison of Processing Techniques

  • Author

    Schmid, Hermann

  • Author_Institution
    General Electric, Binghamton,NY
  • Volume
    1
  • Issue
    2
  • fYear
    1972
  • fDate
    12/1/1972 12:00:00 AM
  • Firstpage
    19
  • Lastpage
    31
  • Keywords
    Consumer electronics; Costs; Economic forecasting; Integrated circuit manufacture; Large scale integration; Manufacturing processes; Power generation economics; Production; Semiconductor device manufacture; Shift registers;
  • fLanguage
    English
  • Journal_Title
    Manufacturing Technology, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0046-838X
  • Type

    jour

  • DOI
    10.1109/TMFT.1972.1135318
  • Filename
    1135318
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=956254