DocumentCode :
956775
Title :
Heterogeneities in Anodic Oxide Films on Tantalum - Their Detection and Electrical Characteristics
Author :
Klein, Gerhart P.
Author_Institution :
P. R. Mallory & Co. Inc.
Volume :
1
Issue :
1
fYear :
1965
fDate :
6/1/1965 12:00:00 AM
Firstpage :
70
Lastpage :
78
Abstract :
A print-out technique was used to study the electronic conductivity of anodic oxide films and, in particular, the electronic conductivity associated with heterogeneities in the oxide film. Tantalum foil was used in the "as received" state, after chemical polishing, abraded, heated in air, and carburized to show the electronic current of defects as a function of formation voltage (film thickness), field strength, and pretreatment.
Keywords :
Anodic oxidation; Capacitors; Electronic conductivity; Heterogeneities; Print-out technique; Quality control; Tantalum pentoxide; Thin film dielectrics; Capacitors; Conductive films; Conductivity; Dielectric films; Dielectric thin films; Electric variables; Industrial electronics; Laboratories; Rough surfaces; Surface contamination;
fLanguage :
English
Journal_Title :
Parts, Materials and Packaging, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9502
Type :
jour
DOI :
10.1109/TPMP.1965.1135372
Filename :
1135372
Link To Document :
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