• DocumentCode
    956923
  • Title

    Plasma Anodized Lanthanum Titanate Films

  • Author

    Whitmore, K.E. ; Vossen, J.L.

  • Author_Institution
    RCA
  • Volume
    1
  • Issue
    1
  • fYear
    1965
  • fDate
    6/1/1965 12:00:00 AM
  • Firstpage
    10
  • Lastpage
    15
  • Abstract
    This paper discusses the application of plasma anodization to the pyrochlore, lanthanum titanate (La2Ti2O7), and the use of this material as a thin film dielectric. The process involves co-evaporation of the metals, lanthanum and titanium, followed by plasma anodization. Evaporation and anodization techniques are fully discussed as are the electrical properties of the resulting films.
  • Keywords
    Capacitors; Dielectric properties; Lanthanum titanate; Plasma anodization; Pyrochlores; Thin films; Vacuum evaporation; Dielectric materials; Dielectric thin films; Electrodes; Lanthanum; Optical films; Oxidation; Plasma properties; Sheet materials; Titanium compounds; Turning;
  • fLanguage
    English
  • Journal_Title
    Parts, Materials and Packaging, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9502
  • Type

    jour

  • DOI
    10.1109/TPMP.1965.1135386
  • Filename
    1135386
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=956923