Title :
Plasma Anodized Lanthanum Titanate Films
Author :
Whitmore, K.E. ; Vossen, J.L.
fDate :
6/1/1965 12:00:00 AM
Abstract :
This paper discusses the application of plasma anodization to the pyrochlore, lanthanum titanate (La2Ti2O7), and the use of this material as a thin film dielectric. The process involves co-evaporation of the metals, lanthanum and titanium, followed by plasma anodization. Evaporation and anodization techniques are fully discussed as are the electrical properties of the resulting films.
Keywords :
Capacitors; Dielectric properties; Lanthanum titanate; Plasma anodization; Pyrochlores; Thin films; Vacuum evaporation; Dielectric materials; Dielectric thin films; Electrodes; Lanthanum; Optical films; Oxidation; Plasma properties; Sheet materials; Titanium compounds; Turning;
Journal_Title :
Parts, Materials and Packaging, IEEE Transactions on
DOI :
10.1109/TPMP.1965.1135386
