DocumentCode

956941

Title

Poly-Para-Xylylene in Thin Film Applications

Author

Cariou, F.E. ; Valley, D.J. ; Loeb, W.E.

Author_Institution

Union Carbide Corp.

Volume

1

Issue

1

fYear

1965

fDate

6/1/1965 12:00:00 AM

Firstpage

54

Lastpage

62

Keywords

Dielectric thin films; Dielectrics and electrical insulation; Optical films; Optical polymers; Polymer films; Solids; Substrates; Temperature; Transistors; Voltage;

fLanguage

English

Journal_Title

Parts, Materials and Packaging, IEEE Transactions on

Publisher

ieee

ISSN

0018-9502

Type

jour

DOI

10.1109/TPMP.1965.1135388

Filename

1135388