Title :
Poly-Para-Xylylene in Thin Film Applications
Author :
Cariou, F.E. ; Valley, D.J. ; Loeb, W.E.
Author_Institution :
Union Carbide Corp.
fDate :
6/1/1965 12:00:00 AM
Keywords :
Dielectric thin films; Dielectrics and electrical insulation; Optical films; Optical polymers; Polymer films; Solids; Substrates; Temperature; Transistors; Voltage;
Journal_Title :
Parts, Materials and Packaging, IEEE Transactions on
DOI :
10.1109/TPMP.1965.1135388