Effects of DC bias on the fabrication of amorphous GdCo RF sputtered films

An investigation has been made on the effects of a dc bias field applied to Gd1-xCOxthin films during rf sputter deposition. Such films may possess uniaxial magnetic anisotropy with easy axis perpendicular to the plane of the film and may be used in magnetic bubble devices. Uniformity in composition, thickness and magnetic properties has been achieved and film composition has been controlled to within one percent. However, significant variations of magnetic properties were observed from film to film.