DocumentCode
957020
Title
Using an Optical Comparator as a High Resolution Reduction Camera
Author
Holland, C., Jr. ; Sumney, L.
Author_Institution
U.S Naval Research Laboratory,D.C.
Volume
1
Issue
2
fYear
1965
fDate
9/1/1965 12:00:00 AM
Firstpage
35
Lastpage
40
Abstract
This paper discusses a method of modifying certain optical comparators so that they may be used as both comparator and high resolution camera. The modifications are uncomplicated and inexpensive. They consist primarily of providing a new light source and a means to hold the photographic plates or film. Since the lenses of the comparator serve as the lenses of the camera, no lens modifications are needed. The system discussed has five discrete reduction capabilities ranging from 10X to 500X. Optical resolution in excess of 500 lines per millimeter has been obtained. A camera system of this type, when compared to the camera ordinarily used for integrated circuit work, has reduced flexibility in certain areas. As an example, one of these areas is the upper limit of the master size. However, in most instances, these limitations can be minimized or circumvented as described.
Keywords
High resolution; Mask-making; Microelectronics; Optical comparator; Reduction cameras; Step and repeat; Cameras; Circuits; Design engineering; Lenses; Light sources; Lighting; Microelectronics; Optical films; Optical filters; Optical sensors;
fLanguage
English
Journal_Title
Parts, Materials and Packaging, IEEE Transactions on
Publisher
ieee
ISSN
0018-9502
Type
jour
DOI
10.1109/TPMP.1965.1135397
Filename
1135397
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