• DocumentCode
    957020
  • Title

    Using an Optical Comparator as a High Resolution Reduction Camera

  • Author

    Holland, C., Jr. ; Sumney, L.

  • Author_Institution
    U.S Naval Research Laboratory,D.C.
  • Volume
    1
  • Issue
    2
  • fYear
    1965
  • fDate
    9/1/1965 12:00:00 AM
  • Firstpage
    35
  • Lastpage
    40
  • Abstract
    This paper discusses a method of modifying certain optical comparators so that they may be used as both comparator and high resolution camera. The modifications are uncomplicated and inexpensive. They consist primarily of providing a new light source and a means to hold the photographic plates or film. Since the lenses of the comparator serve as the lenses of the camera, no lens modifications are needed. The system discussed has five discrete reduction capabilities ranging from 10X to 500X. Optical resolution in excess of 500 lines per millimeter has been obtained. A camera system of this type, when compared to the camera ordinarily used for integrated circuit work, has reduced flexibility in certain areas. As an example, one of these areas is the upper limit of the master size. However, in most instances, these limitations can be minimized or circumvented as described.
  • Keywords
    High resolution; Mask-making; Microelectronics; Optical comparator; Reduction cameras; Step and repeat; Cameras; Circuits; Design engineering; Lenses; Light sources; Lighting; Microelectronics; Optical films; Optical filters; Optical sensors;
  • fLanguage
    English
  • Journal_Title
    Parts, Materials and Packaging, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9502
  • Type

    jour

  • DOI
    10.1109/TPMP.1965.1135397
  • Filename
    1135397