Title :
Thermal Oxide Film Deposition Monitoring Algorithm
Author :
Smith, E. George
Author_Institution :
IBM Federal Systems Div.,VA
fDate :
6/1/1979 12:00:00 AM
Abstract :
A software-implemented algorithm for controlling the amount of thermal oxide film grown on a substrate, along with some experimental results, is presented.
Keywords :
Crystal growth; Integrated circuit fabrication; Semiconductor device fabrication; Size measurement; Fatigue; LAN interconnection; Lead; Monitoring; Optical films; Ovens; Process control; Reflectivity; Temperature; Thermal stresses;
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
DOI :
10.1109/TCHMT.1979.1135451
