Title :
Special Section on Advanced Process Control
Author :
Moyne, James R. ; Patel, Nital S.
Abstract :
The twenty-six papers in this special issue are devoted to advanced process control.
Keywords :
Area measurement; Conferences; Fault detection; Frequency measurement; Manufacturing processes; Process control; Research and development; Semiconductor device manufacture; Sensor systems; Special issues and sections;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2007.907606
