Title :
Performance Assessment of Run-to-Run EWMA Controllers
Author :
Prabhu, Amogh V. ; Edgar, Thomas F.
Author_Institution :
Univ. of Texas, Austin
Abstract :
An iterative method is developed to optimize a performance criterion for best achievable performance for discrete integral controllers used in run-to-run control. An analytical expression is derived so that a realistic assessment of the given integral controller is obtained. Using the theoretical equivalence of discrete integral and exponentially weighted moving average (EWMA) controllers, the method is then extended to performance assessment of EWMA controllers. A semiconductor manufacturing example is used to illustrate the utility of the method.
Keywords :
controllers; feedback; iterative methods; moving average processes; process control; discrete integral controllers; exponentially weighted moving average controllers; iterative method; performance assessment; semiconductor manufacturing; Control systems; Degradation; Feedback control; Filtering; Iterative methods; MIMO; Optimal control; Optimization methods; Performance analysis; Semiconductor device manufacture; Feedback control delay; integral control; performance assessment; single loop;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2007.907611
