• DocumentCode
    958478
  • Title

    Voltage controlled monolithic s.a.w. phase shifter using m.z.o.s. structure

  • Author

    Urabe, S. ; Uki, S.

  • Author_Institution
    NTT Yokosuka Electrical Communication Laboratory, Yokosuka, Japan
  • Volume
    16
  • Issue
    20
  • fYear
    1980
  • Firstpage
    777
  • Lastpage
    778
  • Abstract
    A monolithic surface-acoustic-wave (s.a.w.) phase shifter, fabricated with sputtered zinc oxide on an oxidised n silicon substrate, is demonstrated. Almost 67° of voltage controlled phase shift is achieved in 200 acoustic wavelengths of interaction region at 214 MHz.
  • Keywords
    field effect integrated circuits; phase shifters; surface acoustic wave devices; MZOS; SAW; monolithic integrated circuit; phase shifter; surface acoustic wave filter; voltage controlled phase shift;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19800551
  • Filename
    4244328
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=958478