Title :
Voltage controlled monolithic s.a.w. phase shifter using m.z.o.s. structure
Author :
Urabe, S. ; Uki, S.
Author_Institution :
NTT Yokosuka Electrical Communication Laboratory, Yokosuka, Japan
Abstract :
A monolithic surface-acoustic-wave (s.a.w.) phase shifter, fabricated with sputtered zinc oxide on an oxidised n silicon substrate, is demonstrated. Almost 67° of voltage controlled phase shift is achieved in 200 acoustic wavelengths of interaction region at 214 MHz.
Keywords :
field effect integrated circuits; phase shifters; surface acoustic wave devices; MZOS; SAW; monolithic integrated circuit; phase shifter; surface acoustic wave filter; voltage controlled phase shift;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19800551
