Title :
Trimming thin film resistors by direct resistance heating
Author_Institution :
General Electric Computer Dept.Phoenix, Ariz
Keywords :
Conductivity; Electrical resistance measurement; Microscopy; Oxidation; Radiometry; Resistance heating; Resistors; Surface resistance; Transistors;
Journal_Title :
Parts, Materials and Packaging, IEEE Transactions on
DOI :
10.1109/TPMP.1966.1135552
