• DocumentCode
    959611
  • Title

    Sputtered molybdenum-silicon contact

  • Author

    Singh, Ashutosh

  • Volume
    68
  • Issue
    5
  • fYear
    1980
  • fDate
    5/1/1980 12:00:00 AM
  • Firstpage
    627
  • Lastpage
    628
  • Abstract
    The results of the study of sputtered molybdenum-silicon contact is reported. The contact resistance has been found to be in the range of 3-6 µΩ ċ cm2when the composite structure is annealed at 1050°C for 30 min in nitrogen ambient. Application of passivating layer of boron-doped glass over the molybdenum and subsequent annealing at the said temperature reduced this to 2-3 µΩ ċ cm2.
  • Keywords
    Band pass filters; Circuits; Frequency; Gyrators; Inductors; Network synthesis; Network topology; Notice of Violation; Polynomials; Transfer functions;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1980.11704
  • Filename
    1455973
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=959611