DocumentCode
960767
Title
Graphical Solution for the Back Pressurization Method of Hermetic Test
Author
Ruthberg, Stanley
Author_Institution
Electron Devices Division, DC
Volume
4
Issue
2
fYear
1981
fDate
6/1/1981 12:00:00 AM
Firstpage
217
Lastpage
224
Abstract
The back pressurization method for leak-testing hermetically sealed electronic packages requires gas-flow modeling to relate indicated leakage rates to true leak size. The molecular flow relationship which is appropriate for fine leak sizes is nonlinear and requires a numerical solution, which in actual test application may involve either many trial calculations or the use of approximations that lead to limiting case values. A new graphical procedure is presented for complete solution of the molecular flow equation for any given test condition and package volume through the use of a single set of characteristic curves and a test line. The effects of repetitive testing and of prefill with tracer gas are also considered. The characteristic curves are appropriate for both the helium leak detector and the radioisotope methods of test, while the form of the test line distinguishes between the two methods.
Keywords
Integrated circuit packaging; Integrated circuit testing; Components, packaging, and manufacturing technology; Detectors; Electronic equipment testing; Electronics packaging; Gases; Helium; Leak detection; Nonlinear equations; Radioactive materials; Semiconductor device packaging;
fLanguage
English
Journal_Title
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
Publisher
ieee
ISSN
0148-6411
Type
jour
DOI
10.1109/TCHMT.1981.1135792
Filename
1135792
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