• DocumentCode
    961192
  • Title

    Development of CSP using Au ball bumps as external connection terminals

  • Author

    Onodera, Masanori ; Nakajo, Shinsuke ; Ikumo, Masamitsu ; Kawahara, Toshimi

  • Author_Institution
    Adv. Packaging Technol. R&D Dept., Fujitsu Ltd., Tokyo, Japan
  • Volume
    27
  • Issue
    1
  • fYear
    2004
  • Firstpage
    145
  • Lastpage
    150
  • Abstract
    We developed a new-structure, fine-pitch chip size package (CSP) with Au ball bumps used as external connection terminals. In the manufacturing process, a substrate consisting of a base material made of a Cu alloy (0.3Cr-0.25Sn-0.2Zn-Cu) and spot Ag plating applied to one side was used as a temporary interposer. After the molding process, only the substrate was dissolved selectively, and an interposer-less structure was realized. We founded that we can directly connect Au ball bumps to tip balls of Au wires exposed on the back surface of a package by applying etching dissolution to a substrate. Thus, terminals can now be arranged in as fine a pitch as a wire bonding pitch. We verified that each bond between a Au ball bump and a Au wire has sufficient strength, and the strength did not decrease after 1000 cycles of -55°C/+125°C. We attempted mounting on board using the Au-Au bonding method with an insulating adhesive. No void occurred in the connection areas, and the electrodes on the substrate were properly deformed and connected. After 1400 cycles of -55°C/+125°C, electric resistance of interconnect portion did not decrease, and thus, a high degree of mounting reliability was confirmed.
  • Keywords
    bonding processes; chip scale packaging; copper alloys; electric resistance; electroplating; etching; fine-pitch technology; gold; silver; -55 C; 125 C; Ag; Au; Au ball bumps; CSP; Cu; chip size package; etching dissolution; external connection terminals; manufacturing process; spot Ag plating; wire bonding pitch; Bonding; Chip scale packaging; Copper alloys; Electric resistance; Electrodes; Etching; Gold; Insulation; Manufacturing processes; Wire;
  • fLanguage
    English
  • Journal_Title
    Advanced Packaging, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1521-3323
  • Type

    jour

  • DOI
    10.1109/TADVP.2004.824935
  • Filename
    1288279