Title :
A new grid-generation method for 2-D simulation of devices with nonplanar semiconductor surface
Author :
Chin, Shan-Ping ; Wu, Ching-Yuan
Author_Institution :
Adv. Semicond. Device Res. Lab., Nat. Chiao-Tung Univ., Hsinchu, Taiwan
fDate :
9/1/1993 12:00:00 AM
Abstract :
A general analytical method is proposed for transforming a 2-D multilayer physical domain with the nonplanar semiconductor surface into a 2-D rectangular mathematical domain with a planar surface, with a set of Fourier series being used to describe a general conformal mapping for each layer. Based on the method, a simple iteration algorithm, which incorporates a nonlinear Jacobian-iteration method with the fast Fourier transform (FFT), is developed to solve the system of nonlinear equations due to the mutually coupled boundary conditions. As a result of the analytical conformal mapping, a regular, deformable grid structure can be applied to simulate the device structure with the nonplanar semiconductor surface, and the device simulator using the conventional rectangle-based grid can be easily modified to simulate the device with the nonplanar semiconductor surface
Keywords :
digital simulation; electronic engineering computing; fast Fourier transforms; iterative methods; semiconductor device models; series (mathematics); 2D simulation; FFT; Fourier series; conformal mapping; deformable grid structure; device simulator; fast Fourier transform; grid-generation method; iteration algorithm; mutually coupled boundary conditions; nonlinear Jacobian-iteration method; nonlinear equations; nonplanar semiconductor surface; Analytical models; Boundary conditions; Conformal mapping; Deformable models; Fast Fourier transforms; Fourier series; Jacobian matrices; Mutual coupling; Nonhomogeneous media; Nonlinear equations;
Journal_Title :
Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on
