Title :
Statistical control of VLSI fabrication processes. A framework
Author :
Mozumder, Purnendu K. ; Shyamsundar, C.R. ; Strojwas, Andrzej J.
Author_Institution :
Dept. of Comput. Eng., Carnegie-Mellon Univ., Pittsburgh, PA, USA
fDate :
5/1/1988 12:00:00 AM
Abstract :
A general framework for statistical control of VLSI (very large-scale integration) fabrication processes is given along with the architectural description of a software system that can be used for monitoring, diagnosis, and quality/quantity control of computer-aided integrated circuit manufacture. The task of process control is formulated as one of profit maximization, and the associated objective function and the constraints are developed for a number of manufacturing scenarios. The IC fabrication process is modeled as a stochastic system and the necessary conditions for efficient statistical control of VLSI fabrication processes are described
Keywords :
VLSI; electronic engineering computing; integrated circuit manufacture; manufacturing data processing; process computer control; quality control; IC production; VLSI fabrication processes; computer-aided integrated circuit manufacture; diagnosis; monitoring; process control; profit maximization; quality/quantity control; software system; statistical control; stochastic system; Computer aided manufacturing; Computerized monitoring; Control systems; Fabrication; Integrated circuit manufacture; Integrated circuit modeling; Large scale integration; Process control; Software systems; Very large scale integration;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
