Title :
Laser Processing in Silicon Microelectronics Technology
Author_Institution :
Bell Laboratories, Murray Hill, NJ, USA
fDate :
3/1/1982 12:00:00 AM
Abstract :
Laser irradiation may effect either thermal or chemical changes in target materials. A brief review of the mechanisms involved and a summary assessment of their potential for application in silicon microelectronics technology is presented.
Keywords :
Integrated circuit fabrication; Laser applications, materials processing; Silicon materials/devices; Chemical lasers; Chemical technology; Electron beams; Integrated circuit technology; Laser beam cutting; Laser beams; Microelectronics; Optical materials; Silicon; Temperature;
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
DOI :
10.1109/TCHMT.1982.1135928
