Title :
0.3-μm advanced SAINT FET´s having asymmetric n+-layers for ultra-high-frequency GaAs MMIC´s
Author :
Enoki, Takatomo ; Yamasaki, Kimiyoshi ; Osafune, Kazuo ; Ohwada, Kuniki
Author_Institution :
Electr. Commun. Labs., NTT, Kanagawa, Japan
fDate :
1/1/1988 12:00:00 AM
Abstract :
Improvements in the microwave performance and noise performance of buried p-layer self-aligned gate (BP-SAINT) FETs are discussed. Specifically, a self-aligned gate electrode and an asymmetric n+ -layer structure are investigated. The self-aligned gate electrode reduces parasitic gate capacitances by 0.13 to 0.23 pF/mm compared with a conventional BP-SAINT FET. The asymmetric n+-layer structure reduces short-channel effects (drain conductance, threshold voltage shift, etc.) and gate-drain capacitance. A 0.3-μm gate-length FET was realized without an increase of short-channel effects by using an asymmetric n+-layer structure (advanced SAINT). Improvement of microwave performance is confirmed in this FET structure
Keywords :
III-V semiconductors; Schottky gate field effect transistors; electron device noise; gallium arsenide; solid-state microwave devices; 0.3 micron; BP-SAINT FET; MESFET; UHF MMICs; asymmetric n+-layers; buried p-layer self-aligned gate FET; drain conductance; gate-drain capacitance; microwave performance; noise performance; parasitic gate capacitances; self-aligned gate electrode; short-channel effects; threshold voltage shift; Electrodes; FETs; Gallium arsenide; Gaussian distribution; Leakage current; MMICs; Parasitic capacitance; Space technology; Substrates; Threshold voltage;
Journal_Title :
Electron Devices, IEEE Transactions on