Title :
A Novel Optical Microring Resonator Accelerometer
Author :
Bhola, Bipin ; Steier, William H.
Author_Institution :
Southern California Univ., Los Angeles
Abstract :
A unique optical accelerometer based on a microring resonator fabricated on a flexible substrate is experimentally demonstrated and its performance analyzed. This accelerometer measures the applied acceleration by measuring the shift of the resonant wavelength of the flexible microring resonator. The measured sensitivity of 31 pm/g is in accordance with our calculations. Some schemes of tailoring the sensitivity and the dynamic range are also suggested.
Keywords :
accelerometers; fibre optic sensors; micromechanical resonators; microsensors; optical resonators; acceleration measurement; flexible substrate; optical microring resonator accelerometer; resonant wavelength; Accelerometers; Biomedical optical imaging; Biosensors; Optical feedback; Optical interferometry; Optical resonators; Optical ring resonators; Optical sensors; Optical waveguides; Resonance; Acceleration; fiber-optic sensors; microrings; resonators;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2007.910070
