DocumentCode
962595
Title
Special Section on the International Symposium on Semiconductor Manufacturing 2007 (ISSM 2007)
Author
Gross, Dave
Volume
21
Issue
4
fYear
2008
Firstpage
565
Lastpage
566
Abstract
The five papers in this special section are based on work originally presented at the International Symposium on Semiconductor Manufacturing 2007 (ISSM 2007).
Keywords
Lead compounds; Manufacturing industries; Manufacturing processes; Monitoring; Pulp manufacturing; Semiconductor device manufacture; Semiconductor device modeling; Special issues and sections; Technological innovation; Virtual manufacturing;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2008.2006087
Filename
4657425
Link To Document