Title :
Special Section on the IEEE International Conference on Microelectronic Test Structures
Abstract :
The seven papers in this special section are based on the work presented at the ICMTS 2007.
Keywords :
Circuit testing; Electrical resistance measurement; Electronic equipment testing; Fabrication; MOSFETs; Microelectronics; Random access memory; Semiconductor device testing; Special issues and sections; System testing;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2008.2008008
